MEMS Research Paper

University of Ljubljana

Faculty for math concepts and physics

Department of physics



Author: Matej Andrejašiˇ


Mentor: hello. dr . Igor Poberaj

Marec 2008


MEMS accelerometers are one of the simplest although also many applicable micro-electromechanical systems. They will became vital in car industry, pc and audio-video technology. This seminar gives MEMS technology as a extremely developing industry. Special attention is given to the capacitor accelerometers, how can they work and their applications. The seminar closes with quite thoroughly described MEMS fabrication.

one particular



An accelerometer is an electromechanical system that procedures acceleration causes. These pushes may be static, like the constant force of gravity tugging at each of our feet, or they could be energetic - caused by moving or perhaps vibrating the accelerometer. There are numerous types of accelerometers designed and reported in the materials. The vast majority will be based upon piezoelectric uric acid, but they are too big and to awkward. People tried to develop a thing smaller, that could increase applicability and began searching in the field of microelectronics. They developed MEMS (micro electromechanical systems) accelerometers. The first micro machined accelerometer was designed in 1979 by Stanford College or university, but it took over 15 years before this kind of devices started to be accepted popular products to get large quantity applications [1]. In the 1990s MEMS accelerometers revolutionised the automotive-airbagsystem industry. After that they have allowed unique features and applications ranging from hard-disk protection upon laptops to game remotes. More recently, a similar sensor-core technology has become obtainable in fully built-in, full-featured gadgets suitable for professional applications [2].

Mini machined accelerometers are a extremely enabling technology with a huge commercial potential. They provide decrease power, small and powerful sensing. Multiple sensors tend to be combined to provide multi-axis realizing and more correct data [3].


MEMS technology

What could website link an ink jet printer head, a video projected DLP program, a disposable bio-analysis processor chip and an airbag crash sensor -- yes, they are all MEMS, but what is MEMS? Micro Electronica Mechanical Systems or MEMS is a term coined around 1989 by simply Prof. R. Howe [2] and others to explain an emerging research field, where physical elements, like cantilevers or perhaps membranes, was manufactured for a size more akin to microelectronics routine than to lathe machining. It appears that they share arsenic intoxication features below 100µm that are not machined employing standard machining but applying other techniques globally named micro-fabrication technology. Of course , this kind of simple definition would have microelectronics, yet there is a attribute that digital circuits will not share with MEMS. While digital circuits are inherently sturdy and compact set ups, MEMS have holes, cavity, channels, cantilevers, membranes, and so forth, and, in some way, imitate ‘mechanical' parts. The emphasis on MEMS based on si is clearly a result of the vast understanding on silicon material and silicon structured microfabrication gained by years of study in microelectronics. And again, even when MEMS are based on si, microelectronics procedure needs to be adapted to appeal to thicker level deposition, deeper etching and to introduce exceptional steps to cost-free the mechanical structures. MEMS needs a different set of brain, where subsequent to gadgets, mechanical and material know-how plays an elementary role. After that, many more MEMS are not based on silicon and can be manufactured in polymer, in a glass, in quartz or even in metals...[2]. The development of a MEMS element has a expense that should not be misevaluated and the technology has the probability to bring exclusive benefits. The reasons that immediate the use of MEMS technology happen to be for example...

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vertical capacitive accelerometer, Detectors and Actuators A 119 (2005) 8-18

A (not so) brief introduction

( (18. installment payments on your 2008))

[3] S. Beeby, G. Ensell, M. Kraft, N. White, MEMS mechanised sensors (Artech house inc.,

USA, 2004)

[4] T. E. Lyshevski, Mems and Nems: systems, devices and structures (CRC Press LLC, USA,



(10. 3. 2008)

Documents, pp. 1169-1172, June 97.

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[14] (14. 2 . 2008)